[18a-E307-1~8] 17.1 Carbon nanotubes & other nanocarbon materials

[18a-E307-5] Growth of Single-Walled Carbon Nanotubes by Hot-Filament Chemical Vapor Deposition at Low Temperatures Using Double-Layer Film Consisting of Iron and Cobalt Layers as Catalyst

〇Shunsuke Saito, Yutaka Ishikawa, Takafumi Nishiguchi, Miyano Kotaro

Keywords:Carbon Nanotube, Low Temperature Growth, Laminated Film

The growth of single-walled carbon nanotubes (SWCNTs) was attempted by hot-filament chemical vapor deposition (CVD) at low temperatures using a double-layer film consisting of iron and cobalt layers as a catalyst. Ethanol was used as the carbon source. At a growth temperature of 350℃, few SWCNTs were grown when a cobalt film was used as a catalyst, whereas the growth of SWCNTs was confirmed when a double-layer film consisting of iron and cobalt layers was used as a catalyst. Raman spectra of products obtained at 350℃ showed G band peak at 1590cm^-1~1592cm^-1 and radial breathing mode peaks at 222cm^-1,264cm^-1 and 281cm^-1.Moreover, G^- peak was observed. By laminating the iron and cobalt layers, the catalyst film changed into particles at a growth temperature of 350℃.