[18p-E202-1~18] 12.7 Biomedical Engineering and Biochips

[18p-E202-6] Evaluation of Detection Sensitivity of Biosensor using Ultra-Thin Silicon Nanowire

〇Hui Zhang¹, Kei Okabe¹, Naoki Kikuchi¹, Noriyasu Ohshima², Taira Kajisa³, Toshiya Sakata⁴, Takashi Izumi², Hayato Sone¹ (1.Gunma Univ., 2.Gunma University, 3.Tokushima Univ., 4.The Univ. of Tokyo)

Keywords:Silicon Nanowire Biosensor, Electron Beam Lithography, Antigen-Antibody Specific Binding

To achieve ultra-sensitive silicon nanowire biosensor, the width of SiNW was decreased to 11 nm and the detection sensitivity of the biosensor was evaluated. On the basis of precise process control of electron beam lithography and reactive ion etching, SiNW with width of 11 nm was successfully fabricated. The performance of the biosensor was evaluated through detecting antigen-antibody specific binding. It was demonstrated that using ultra-thin SiNW benefits to increase the detection sensitivity of biosensor.