The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Hiroshi Ikenoue(Kyushu Univ.), Hitoshi Habuka(Yokohama Natl. Univ.)

3:45 PM - 4:00 PM

[18p-E304-9] SiC Quantum-Dot Formation in Oxide Film using Hot Double Si+/C+ Ion Implantation

〇Rikito Kanazawa1, Takashi Aoki1, Toshiyuki Sameshima2, Tomohisa Mizuno1 (1.Kanagawa.Univ, 2.Tokyo.Univ)

Keywords:semiconductor, SiC, Quantum-Dot