[18p-PA4-1~25] 6.2 Carbon-based thin films

[18p-PA4-12] Substrate temperature dependence of optical properties of PIG-PECVD deposited a-C:H films

〇Yusuke Kondo¹, Yoshiharu Kakehi¹, Kazuo Satoh¹, Naomi Matsumura¹, Yong-Gu Shim² (1.ORIST, 2.Osaka Pref. Univ.)

Keywords:Plasma enhanced chemical vapor deposition, Hydrogenated amorphous carbon, Spectroscopic ellipsometry