[18p-PA4-1~25] 6.2 Carbon-based thin films

[18p-PA4-9] Fabrication and structural analysis of a-CNx films from the decomposition of BrCN induced by the microwave plasma flow of Ar

〇Tsubasa Takai¹, Haruhiko Ito¹ (1.Nagaoka Univ.of Tech)

Keywords:Plasma CVD, amorphous, carbon nitride