Tsubasa Takai

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[18p-PA4-1~25] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

[18p-PA4-9] Fabrication and structural analysis of a-CNx films from the decomposition of BrCN induced by the microwave plasma flow of Ar

〇Tsubasa Takai¹, Haruhiko Ito¹ (1.Nagaoka Univ.of Tech)