[18p-PA5-1~22] 6.4 Thin films and New materials

[18p-PA5-5] Preparation and evaluation of W, Nb and Mo-doped vanadium oxide films

Junpei Nishi¹, Shotaro Nakamura¹, Mami Yokokura¹, Takahiro Himuro¹, 〇Yoji Saito¹ (1.Seikei Univ.)

Keywords:infrared sensor, sol-gel method, vanadium dioxide film

We prepared and evaluated W, Nb and Mo-doped vanadium oxide films.