[18p-PB1-1~84] 10 スピントロニクス・マグネティクス（ポスター）

▲ [18p-PB1-68] Fabrication of closely packed magnetic arrays for physical reservoir computing

〇Hitoshi Kubota¹、Kay Yakushiji¹、Akio Fukushima¹、Shingo Tamaru¹、Sumito Tsunegi¹、Tomohiro Taniguchi¹、Atsushi Sugihara¹、Tomohiro Nozaki¹、Tatsuya Yamamoto¹、Takayuki Nozaki¹、Shinji Yuasa¹、Minori Goto^2,3、Kazuki Takahashi²、Hikaru Nomura^2,3、Yoshishige Suzuki^2,3 (1.AIST、2.Osaka Univ.、3.CSRN-Osaka)

キーワード：MTJ, reservoir computing, magnetic coupling

We investigate experimentally a magnetic physical reservoir using closely packed magnetic tunnel junction (MTJ) array. The MTJs makes it possible to read the magnetization states through magnetoresistance effect, which is used for reservoir computing. Previously we reported that 8x8 MTJ dot arrays were fabricated using electron beam (EB) lithography, ion etching, and lift-off technique. The smallest gap was about 20 nm, which corresponds to the simulation model by Nomura et al. (JJAP 58 (2019) 070901). Although fundamental fabrication process was developed, there were some issues remained. In this presentation, we report the difficulties in the process and how we improved them.