[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

▲ [18p-PB5-8] Role of water additive in the synthesis of AlO_x by mist-CVD

〇Arifuzzaman Rajib Rajib¹, Takanori Kuroki¹, Koki Imai¹, Shunji Kurosu², Tomofumi Ukai², Yasuhiko Fujii², Masahide Tokuda², Tatsuro Hanajiri², Ryo Ishikawa¹, Hajime Shirai¹ (1.Saitama Univ., 2.Toyo Univ.)

Keywords:mist-CVD, Alumina, Water addition