The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Shosuke Fujii(Toshiba Memory), Yasushi Hotta(Univ. of Hyogo)

11:45 AM - 12:00 PM

[19a-E305-11] Study of annealing condition for improving quality of Si/Hf0.5Zr0.5O2 interface

〇Kento Tahara1, Kato Kimihiko1, Toprasertpong Kasidit1, Takenaka Mitsuru1, Takagi Shinichi1 (1.Univ.Tokyo, Faculty of engineering)

Keywords:ferroelectrics, annealing