The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Shosuke Fujii(Toshiba Memory), Yasushi Hotta(Univ. of Hyogo)

9:30 AM - 9:45 AM

[19a-E305-3] Leakage current of sputter fabricated AlScN film

〇Kazuki Kusafuka1, Sunglin Tsai1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui2, Kuniyuki Kakushima1 (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR)

Keywords:AlScN, MFM