Time-Resolved X-ray Diffraction From Nitride Thin Films: Observation of the Specular Rod

Wolfgang Voegeli; Masamitu Takahasi; Takuo Sasaki; Seiji Fujikawa; Kanya Sugitani; Tetsuroh Shirasawa; Etsuo Arakawa; Tomohiro Yamaguchi

Presentation information

Oral presentation

Code-sharing session » 【CS.7】 Code-sharing Session of 7.2 & 7.4 & 9.5

[19a-E318-1~12] 【CS.7】 Code-sharing Session of 7.2 & 7.4 & 9.5

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E318 (E318)

Takao Sasagawa(Tokyo Tech), Hideyuki Kawasoko(Tohoku Univ.), Satoshi Toyoda(Tohoku Univ.)

11:45 AM - 12:00 PM

[19a-E318-11] Time-Resolved X-ray Diffraction From Nitride Thin Films: Observation of the Specular Rod

〇Wolfgang Voegeli¹, Masamitu Takahasi^2,3, Takuo Sasaki², Seiji Fujikawa², Kanya Sugitani³, Tetsuroh Shirasawa⁴, Etsuo Arakawa¹, Tomohiro Yamaguchi⁵ (1.Tokyo Gakugei Univ., 2.QST, 3.Univ. of Hyogo, 4.AIST, 5.Kogakuin Univ)

Keywords:thin film growth, X-ray diffraction, time-resolved

We present a method for time-resolved X-ray diffraction and reciprocal space mapping that can be used for in-situ observation of thin film growth with sub-second time resolution. The application of the method to the growt of InGaN thin films will also be reported.