[19a-PB3-1~25] 13.8 Optical properties and light-emitting devices

[19a-PB3-9] Effects of Si and C additive amount and post-annealing temperature on the optical properties of amorphous and nanocrystalline SiC embedded in silicon oxide films

〇(M2)Rei Narimatsu¹, Hiroshi Katsumata¹ (1.Meiji Univ.)

Keywords:nanocrystal, silicon carbide, photoluminescence