[19p-B11-1~8] Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

[19p-B11-5] Physical Cleaning of Diversified Electronic Devices
- Usefulness of Spray Cleaning And Their Problems -

〇Yoshiyuki Seike¹ (1.Aichi Inst. of Tech.)

Keywords:electric devices, physical cleaning, spray

There are many wet process cleaning steps in the manufacture of semiconductor devices, MEMS, flat panel display (FPD). In this report, the characteristics of various spray cleanings were clarified, and their cleanability was confirmed by experiments using sample substrates coated with polystyrene latex particles (PSL particles).