[19p-E302-1~8] 先端イオン顕微鏡技術って何？ナノスケール材料・デバイスへの展開

▲ [19p-E302-6] Nano Patterning and Observation Using Helium Ion Microscope, Usage examples (2) at Osaka University

〇Kimihiro Norizawa¹ (1.Osaka Univ.)

キーワード：Helium Ion Microscope, HIM, share use

Helium Ion Microscope has been installed to Nanotechnology Open Facilities at Osaka University in 2014 and is operating as a shared equipment in MEXT Nanotechnology Platform project. In this presentation, examples of use of helium ion microscope at Osaka University will be introduced.