Manufacture and evaluation of High-k/GeO<sub>2</sub>/Ge

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

4:15 PM - 4:30 PM

〇Kenichirou Toyoda¹, Ryuichiro Watanabe¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TAT)

Keywords:semiconductor