[20a-C310-1~12] 6.4 Thin films and New materials

[20a-C310-4] Thin film growth of Mn₃CuN thin films by Ultra-High-Vacuum Aurora PLD

〇Takahiko Kawaguchi¹, Jumpei Suzuki¹, Naonori Sakamoto¹, Hisao Suzuki¹, Naoki Wakiya¹ (1.Shizuoka Univ.)

Keywords:epitaxial thin film, PLD, anti-perovskite

We have reported on the epitaxial growth of Mn₃CuN thin films by Aurora PLD, which can be induced magnetic field during growth. However, an oxide phase was also formed in the obtained thin films, that is, the thin films were not single-phased. This is due to remained oxygen in the growth chamber. In this study, we developed Ultra-High-Vacuum Aurora PLD and tried to prepare single-phased Mn₃CuN thin films.