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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[20a-E203-1~12] 7.5 Ion beams

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E203 (E203)

Junichi Yanagisawa(Univ. of Shiga Pref.), Satoshi Ninomiya(Univ. of Yamanashi)

11:30 AM - 11:45 AM

[20a-E203-10] Surface modification and etching of MoS₂ with GCIB irradiation

〇(M1)Masayuki Kenmotsu¹, Noriaki Toyoda¹ (1.Univ. of Hyogo)

Keywords:gas culster ion beam, molybdenum sulfide