[20a-PA2-1~11] 3.5 Laser system and materials

[20a-PA2-11] Observation of hyper-parametric oscillation from SiN ring resonators

〇Kentaro Furusawa¹, Norihiko Sekine¹, Akifumi Kasamatsu¹, Yoshinori Uzawa² (1.NICT, 2.NAOJ)

Keywords:Microring resonator, Silicon Nitride, Four wave mixing

Silicon nitride (SiN) is an attractive platform for nonlinear optical devices operating at telecommunication wavelength. We report the optical properties of SiN microring resonators fabricated in the Ligentec-VLC photonics foundry process, where we measured the Q factors exceeding 10⁶ as well as the peak extinction ratios more than 10 dB. Besides, observation of Hyper-parametric oscillation in these microring resonators is also reported.