2:45 PM - 3:00 PM
[20p-B11-4] Possibility of In-situ Measurements of Double Curling Probes for Material Processing
Keywords:Plasma Diagnostics, Film Thickness Measurement, In-situ measurement
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)
Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)
2:45 PM - 3:00 PM
Keywords:Plasma Diagnostics, Film Thickness Measurement, In-situ measurement