[20p-B11-1~12] 8.1 Plasma production and diagnostics

△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

〇Yuta Ino¹, Yasunori Ohtsu¹, Koya Yasuda¹ (1.Saga Univ.)

Keywords:sputtering, deposition, water-repellent