[20p-E206-1~11] 3.9 Terahertz technologies

[20p-E206-2] Resonant-Tunneling-Diode Terahertz Oscillators with Cylindrical Cavity Resonators

Ryunosuke Izumi¹, Takumi Sato¹, 〇Safumi Suzuki¹, Masahiro Asada¹ (1.Tokyo Tech)

Keywords:terahertz oscillator, resonant tunneling diode

We proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with cylindrical cavity. As a preliminary experiment, the proposed oscillator was fabricated using electron-beam lithography with three-layer resist. Oscillation up to 1.79 THz was obtained in the fabricated oscillators, which was lower than the theoretical expectation because of a parasitic capacitance of the metal post connecting the cavity and RTD. Theoretical calculations including this parasitic capacitance agreed well with the measurement.