The 80th JSAP Autumn Meeting 2019

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-E312-1~14] 6.2 Carbon-based thin films

Fri. Sep 20, 2019 1:30 PM - 5:30 PM E312 (E312)

Takatoshi Yamada(AIST), Tsuyoshi Yoshitake(Kyushu Univ.)

4:30 PM - 4:45 PM

[20p-E312-11] Electrical properties of P-doped type IIa diamondby ion implantation followed by annealing

〇Toshiya Inagaki1, Yuhei Seki1, Yasushi Hoshino1, Jyoji Nakata1 (1.Kanagawa University)

Keywords:Ion implantation