The 80th JSAP Autumn Meeting 2019

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Code-sharing session » 【CS.6】 Code-sharing Session of 6.5 & 7.6

[20p-E319-1~10] 【CS.6】 Code-sharing Session of 6.5 & 7.6

Fri. Sep 20, 2019 1:45 PM - 4:30 PM E319 (E319)

Kei Mitsuhara(Ritsumeikan Univ.)

2:30 PM - 2:45 PM

▲ [20p-E319-4] Morphological changes of Cu surfaces by comparison of Ar+ and Xe+ ion irradiation induced by photoemission-assisted plasma

〇SAIJIAN AJIA1, Nobuhisa Kamata1, Shuichi Ogawa1, Yuji Takakuwa1 (1.Tohoku Univ.)

Keywords:surface flattening, photoemission-assisted plasma ion source, momentum transfer effect

A photoemission-assisted plasma (PAP) ion source with Xe excimer lamp (hn =7.2 eV) has been developed to flatten Cu surfaces below 1 nm for achieving surface activated bonding at RT without pressurization. For this sake, ion beams with ion energy Eion < 50 eV are demanded to avoid sputtering-induced roughening. In this study, the momentum transfer effect of ion irradiation on flattening of Cu surface has been clarified by comparison of Ar+ and Xe+ ion irradiation.