[20p-E319-1~10] 【CS.6】 6.5 表面物理・真空と7.6 原子・分子線およびビーム関連新技術のコードシェアセッション

[20p-E319-9] Dielectric function database construction between visible light and ultra-soft X-ray region. Derivation of energy loss function and inelastic mean free paths for iron oxide.

〇Yoshitomo Harada¹、Da Bo¹、Hiroshi Shinotsuka¹、Shigeo Tanuma¹、Hideki Yoshikawa¹、Hideto Yanagihara² (1.NIMS、2.Tsukuba Univ.)

キーワード：REELS, iron oxides, energy loss function

For making dielectric function database, we try to evaluate the dielectric function between visible light and ultra-soft X-ray region by using high energy resolution REELS apparatus. In this study, we report energy loss function and inelastic mean free paths of a-Fe₂O₃ and Fe₃O₄ epitaxial film deposited reactive sputtering method from evaluated dielectric function by using angle resolve REELS measurements and target factor analysis method.