[20p-N304-1~10] Latest trend on atomic layer processes

[20p-N304-2] How the materials informatics can be applied to ALD and ALE

〇Toyohiro Chikyo¹, Hiori Kino¹ (1.NIMS)

Keywords:Informatics, ALD, ALE

We will examine whether the data science methods can be applied to ALD and ALE. The precursors are considerable predicted by automatic calculation using first principle calculation. The surface decomposition process can be speculated by machine learning at a certain temperature and non polar amorphous SiO2/Si (100) surface. Especially if we can find the proper descriptors for decomposition, rather fast calculation will be possible and we can compare the virtual process and real one simultaneously.iIn the lecture day, I will outline the current situation in materials informatics and mention the possibility of application to ALE and ALD.