[20p-PB2-1~18] 7 Beam Technology and Nanofabrication (Poster)

[20p-PB2-5] Measurement of Absorbed Current for Quantitative Evaluation of Scattered Electrons in a Scanning Electron Microscope

〇(M2)Morimoto Kentaro¹, Ito Yuka¹, Kotera Masatoshi¹ (1.Osaka Inst. of Technol.)

Keywords:Fogging Electrons, Scanning Electron Microscope