The 80th JSAP Autumn Meeting 2019

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7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication (Poster)

[20p-PB2-1~18] 7 Beam Technology and Nanofabrication (Poster)

Fri. Sep 20, 2019 1:30 PM - 3:30 PM PB2 (PB)

1:30 PM - 3:30 PM

[20p-PB2-6] Simulation of multiply scattered electron trajectories in scanning electron microscope specimen chamber

〇(M2)Yuka Ito1, Kentaro Morimoto1, Masatoshi Kotera1 (1.Osaka Inst. of Technol.)

Keywords:scanning electron microscope, fogging electron