1:30 PM - 3:30 PM
[20p-PB2-6] Simulation of multiply scattered electron trajectories in scanning electron microscope specimen chamber
Keywords:scanning electron microscope, fogging electron
Poster presentation
7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication (Poster)
Fri. Sep 20, 2019 1:30 PM - 3:30 PM PB2 (PB)
1:30 PM - 3:30 PM
Keywords:scanning electron microscope, fogging electron