[21a-B01-1~10] 23.1 Joint Session N "Informatics"

[21a-B01-4] High throughput XPS spectrum analysis by using IoT data transfer system

〇Yoshitomo Harada¹, Mineharu Suzuki¹, Hiroshi Shinotsuka¹, Hiroko Nagao¹, Shigeyuki Matsunami¹, Hideki Yoshikawa¹ (1.NIMS)

Keywords:XPS, IoT, BIC

XPS is commonly used in materials research and the peak analysis is a most important procedure in many cases. In this procedure,the analysis range and some parameter values are determined by a respective analyst, leading to a scattering of analyzed results.We have been developing the analyst-independent peak analysis program with Bayesian Information Criterion (BIC). We report the highthroughput XPS spectrum analysis trial applying this new program in conjunction with the IoT data transfer system.