Study on reducing on-resistance by introducing strain into silicon vertical power device

Presentation information

Oral presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

Sat. Sep 21, 2019 9:00 AM - 12:30 PM E301 (E301)

Kozo Makiyama(Fujitsu Lab.)

10:30 AM - 10:45 AM

〇Takeya Inoue¹, Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Hiroshi Iwai¹, Kazuo Tsutui¹ (1.Tokyo Tech)

Keywords:silicon vertical power device