[21a-E319-1~5] 6.5 Surface Physics, Vacuum

[21a-E319-4] Development of Nonevaporable Getter Coating Using Oxygen Free Pd/Ti, Electron Microscopic Observation, and Surface Analysis by Synchrotron Radiation X-Ray Photoelectron Spectroscopy

Tetsuya Miyazawa¹, Masashi Kurihara², Shinya Ohno², Misao Yamanaka³, Ayako Hashimoto^3,4, Yu Kano⁵, Yasuo Nakayama⁵, Kenichi Ozawa⁶, Takashi Kikuchi⁷, 〇Kazuhiko Mase^7,1 (1.SOKENDAI, 2.Yokohama Nat'l Univ., 3.NIMS, 4.Univ. of Tsukuba, 5.Tokyo Univ. of Science, 6.Tokyo Tech, 7.KEK)

Keywords:nonevaporable getter, vacuum, synchrotron radiation X-ray photoelectron spectroscopy

We developed a new nonevaporable getter, oxygen free Pd/Ti. A vacuum vessel coated with oxygen free Pd/Ti can be activated by baking at 150 °C for 12 hours to evacuate residual H₂ and CO. In addition, the pumping speeds do not decrease even when the air introduction and activation are repeated. The oxygen free Pd/Ti deposition apparatus manufacturing cost and running cost are low, and no expert engineer is required. In this presentation, we report the details of oxygen-free Pd/Ti film deposition, the observation by electron microscope, and the surface analysis results by synchrotron radiation X-ray photoelectron spectroscopy.