The 80th JSAP Autumn Meeting 2019

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[21a-PA2-1~31] 6.3 Oxide electronics

Sat. Sep 21, 2019 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

[21a-PA2-12] Synthesis of Cu2O Epitaxial Thin Films by Mist Chemical Vapor Deposition

Daichi Oka1, Tomoteru Fukumura1,2 (1.Tohoku Univ., 2.Tohoku Univ. AIMR & CRC)

Keywords:p-type semiconductor, epitaxy, solution process

Cu2O is a p-type semiconductor promissing for oxide-based electronic devices.
In this study, we demonstrate successful synthesis of Cu2O epitaxial thin films by mist chemical vapor deposition. (110)-oriented epitaxail thin films were synthesized from aqueous solution of Bis(2,4-pentanedionato)copper(II) on yttria stabilized zirconia single crystal substrates at an optimum temperature This is the first report of epitaxial synthesis of Cu2O on insulating substrate via facile solution route and would promote the actual use.