12:45 PM - 1:00 PM
[21p-B31-1] Growth of alpha-Ga2O3 thin films using choride-based dilute gallium source solutions by mist chemical vapor deposition (II)
Keywords:gallium oxide, mist chemical vapor deposition
We investigated relationships between the pH value of source solutions and the growh rates in the thin film growth of alpha-Ga2O3 by mist chemical vapor deposition.