Kazuo Tsutsui

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:45 PM - 5:00 PM S221 (S221)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[10p-S221-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

2:30 PM - 3:00 PM

[10p-S221-3] [INVITED] Individual Atomic Imaging of Multiple Dopant Sites in As-Doped Si Using Spectro-Photoelectron Holography

〇Kazuo Tsutsui¹, Tomohiro Matsushita², Kotaro Natori¹, Takayuki Muro², Yoshitada Morikawa³, Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kouichi Hayashi⁴, Fumihiko Matsui⁵, Toyohiko Kinoshita² (1.Tokyo Tech, 2.JASRI, 3.Osaka Univ., 4.Nagoya Inst. Tech., 5.Inst. Molecular Science)

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