Yoshihiro Koga

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 10:00 AM - 11:30 AM M113 (H113)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[10a-M113-1~6] 6.2 Carbon-based thin films

10:00 AM - 10:15 AM

[10a-M113-1] A Study of SOI Wafer with SiC-BOX Layer using Room-Temperature Bonding

〇Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)