Kosei Kamada

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 4:45 PM W631 (W631)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[9p-W631-1~11] 3.7 Laser processing

3:00 PM - 3:15 PM

△ [9p-W631-6] Al doping of 4H-SiC by excimer laser irradiation to Al₂O₃ thin films

〇(B)Kosei Kamada¹, Toshifumi Kikuchi^1,2, Daisuke Nakamura¹, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ.)