Shinsaku Kawabata

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:30 AM - 12:30 PM M121 (H121)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[9a-M121-1~11] 13.7 Compound and power electron devices and process technology

11:30 AM - 11:45 AM

△ [9a-M121-8] Improved insulator/semiconductor interfaces in Al₂O₃/AlGaN/GaN structures by AlGaN layer regrowth

〇(M1C)Shinsaku Kawabata¹, Joel Asubar¹, Hirokuni Tokuda¹, Akio Yamamoto¹, Masaaki Kuzuhara¹ (1.Fukui Univ)