Jihee Jeon

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:45 PM S221 (S221)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[9p-S221-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:15 PM - 4:30 PM

▲ [9p-S221-10] Saturated concentration of activated Sb in Sb-doped Ge epitaxial thin films

〇(D)Jihee Jeon¹, Shigehisa Shibayama¹, Osamu Nakatsuka^1,2, Shigeaki Zaima³ (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.IIFS, Nagoya Univ.)