Tatsuki Koyanagi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM

[10a-M114-10] Preparation of Single Crystalline Stripes by mCLBS using Sputtered Si Films

〇Tatsuki Koyanagi¹, Toshiki Shirakawa¹, Mitsuki Hirasue¹, Wenchang Yeh¹ (1.Shimane Univ.,Interdisciplinary Fac. Sci. & Engng.)