Hiroki Utsumi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

△ [10a-M114-3] Double-gate Cu-MIC poly-Ge thin-film transistors on PI formed by spin coating

〇(M2)Hiroki Utsumi¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)