Yuto Komatsu

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 11:45 AM M121 (H121)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10a-M121-1~10] 13.7 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

[10a-M121-8] Photo-electrochemical (PEC) etching on AlGaInN/AlGaN heterostructures

〇Yuto Komatsu¹, Keisuke Uemura¹, Daiki Hosomi², Makoto Miyoshi², Taketomo Sato¹ (1.RCIQE,Hokkaido Univ., 2.Nagoya Inst. of Tech.)