Taro Hayakawa

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:30 AM - 11:30 AM S224 (S224)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[10a-S224-1~8] 7.5 Ion beams

10:15 AM - 10:30 AM

[10a-S224-4] Influence of beam plasma on divergence angle of low energy ion beam.

〇Taro Hayakawa¹, Tomokazu Nagao¹, Yutaka Inouchi¹, Takashi Mikami¹ (1.Nissin Ion Equipment)