Hirotsugu Sugiura

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 4:25 PM M103 (H103)

Symposium (Oral)
| Symposium
| Carbon related materials and plasma processing; state of the art and subjects

[10p-M103-1~7] Carbon related materials and plasma processing; state of the art and subjects

3:40 PM - 3:55 PM

△ [10p-M103-6] In-situ transmission electron microscopy observation of layer-by-layer etching of graphene under remote oxygen plasma irradiation

〇Hirotsugu Sugiura¹, Hiroki Kondo¹, Kimitaka Higuchi², Shigeo Arai², Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Masaru Hori³ (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.Nagoya Univ. Inst. of Innovation for Future Society)

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