Tsunenobu Kimoto

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

2:30 PM - 3:00 PM

[10p-W922-3] Ion Implantation into SiC and Device Applications

〇Tsunenobu Kimoto¹ (1.Kyoto Univ.)