Digh Hisamoto

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

3:00 PM - 3:30 PM

[10p-W922-4] Design Concept of Impurity Layers’ Configurations in 3-Dimensional SiC MOSFETs

〇Digh Hisamoto¹, Naoki Tega¹, Kazuki Tani¹, Takeru Suto¹, Yuki Mori¹ (1.Hitachi, Ltd.)