Takashi Tanii

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

5:20 PM - 5:50 PM

[10p-W922-8] Fabrication of single impurity defects in a regular array by ion implantation and its quantum application

〇Takashi Tanii¹, Takahiro Shinada², Tokuyuki Teraji³, Shinobu Onoda⁴, Takeshi Ohshima⁴, Liam McGuinness⁵, Fedor Jelezko⁵, Yan Liu⁶, E Wu⁶, Wataru Kada⁷, Osamu Hanaizumi⁷, Hiroshi Kawarada¹, Junichi Isoya⁸ (1.Waseda Univ., 2.Tohoku Univ., 3.NIMS, 4.QST, 5.Ulm Univ., 6.ECNU, 7.Gunma Univ., 8.Univ. of Tsukuba)

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