Yohan DOUEST

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

▲ [11a-PA5-11] BCl₃-based plasma etching of (010) β-Ga₂O₃ substrates

〇(M1C)Yohan DOUEST^1,3, Cedric MANNEQUIN¹, Toshimitsu ITO², Christophe VALLEE^1,3, Etienne GHEERAERT^1,3, Masahiro SASAKI¹ (1.Tsukuba Univ., 2.AIST, 3.Grenoble-Alpes Univ.)