Yuuto Kawato

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

[11a-PA5-2] Magnetic Mirror Type Magnetron Sputtering Cathode for Low Gas Pressure Operation

〇Yuuto Kawato¹, Taisei Motomura², Minami Kajiwara¹, Tatsuo Tabaru², Masato Uehara², Tetsuya Okuyama¹ (1.NIT, Kurume College, 2.AIST)