Toshihiro Mitani

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

[11a-PA5-4] Low Temperature Synthesis and Property Evaluation of a - C: F Thin Films
Fabricated by Electronic Excitation of c-C₄F₈ / SiF₄Mixed Condensed Layer

〇(M1)Toshihiro Mitani¹, Tetsuya Sato¹, Yuichiro Shiozawa², Yoshinobu Uegaki² (1.Univ. Yamanashi, 2.Yamanashi Indust. Tech. Center)